Composition Control of High Resolution Focused Electron Beam Induced Deposits
Gas assisted focused electron beam induced deposition is a direct write lithography technique that allows for the deposition of high resolution nanoscale structures inside standard scanning electron microscopes. Here we show that the co-deposition of carbon is an inherent mechanism of outmost importance for all FEBID processes performed in standard high-vacuum (10-6 mbar) SEMs and should be always taken into account when determining the fundamental parameters for electron-precursor interactions or in order to account for the composition of the deposits. Previously we have shown that by using a general two adsorbate model it was possible to describe the variation of composition with the beam pulse time and to find a pulse duration window for tuning of composition, when the electron triggered reaction is in the electron-limited regime for one adsorbate and still in the adsorbate-limited regime for the other one. Here we show that in the particular case when the carbon is provided by surface diffusion of surrounding hydrocarbons, the composition depends on the size of the nanodeposits, which can be used as an additional parameter, besides the control of the beam exposure time, in order to tune the metal/matrix ratio and to obtain novel nano-composite materials with tailored properties. By optimizing the Cobalt/Carbon ratio and the size of the active area, it was possible to realize nano Hall sensors with outstanding magnetic properties.
Mihai Gabureac Laurent Bernau Ivo Utke
Swiss Federal Laboratories for Materials Science and Technology (EMPA), Feuerwerkerstr.39, CH-3602 Thun, Switzerland
国际会议
长春
英文
1-6
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）