Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-enhanced AFM Probes

摘要：

In this paper, a focused ion beam processing technique is presented that facilitates the modification of carbon nanotubes (CNTs) in terms of length, diameter and orientation. The CNTs are mounted onto an atomic force microscope (AFM) probe by using a nanorobotic microgripper-based pick-and-place handling strategy. Such CNT-enhanced AFM probes are needed for metrology measurements of nanostructures with critical dimensions and high aspect ratios. The complete process of assembly and processing is realized inside a nanorobotic dual beam scanning electron microscope (SEM) and focused ion beam (FIB) machine.

作者: Sergej Fatikow Malte Bartenwerfer Volkmar Eichhorn

作者单位: Division Microrobotics and Control Engineering (AMiR), Department of Computing Science University of Oldenburg, Oldenburg, Germany

会议类型: 国际会议

会议名称: The First International Conference on Manipulation,Manufacturing and Measurement on the Nanoscale(第一届3M-NANO国际会议)

会议地点: 长春

会议语种:英文

页码: 1-6

在线出版日期: 2011-08-29（万方平台首次上网日期，不代表论文的发表时间）