Study on Nanofabrication with Dynamic Electrical-field-induced Anodic Oxidation
Nanofabrication technique is an important foundation technology for building a new generation of nanoelectronic devices，and also the critical event of achieving the invention of nanometer device. Local oxidation induced by electric field with atomic force microscope (AFM) is a promising method of manufacturing technology. Here, an experimental setup with process monitor is established for analyzing the fabrication mechanism. Oxide lines on Si surface with higher aspect ratio are observed by applying square wave voltage based on the conductive AFM, meanwhile the actual fabricating voltage and the real-time electric current between the tip and the sample is monitored. Compared with oxide structures fabricated by ac voltages, nanofabrication based on AFM dynamic electrical-field induced oxidation gives higher flexibility on the control of oxide size and aspect ratio by modulating the pulse voltage. We think that the structures result from the finite diffuse speed and concentration of oxygen ion, and the higher aspect ratio results from the effect of dynamic electric field in the conductor- nonconductor-semiconductor junction formed in the course of fabrication.
Kexiang Hu Qingkang Wang Xiaodong Hu Sen Wu
Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, Ch State Key Lab of Precision Measuring Techniques and Instruments, Tianjin University, Tianjin, China
国际会议
长春
英文
1-5
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）