Nanorobot-based Handling and Transfer of Individual Silicon Nanowires
This paper presents a new experimental implementation for well directed handling of silicon nanowires with diameters of less than 100nm and length of up to 10μm. They are transferred from a production substrate to a different electrode substrate by using adhesive bond techniques and FIB assisted milling. The goal of this series is the placement on the electrodes in order to facilitate further electrical characterization measurements.
Malte Bartenwerfer Sergej Fatikow
Department of Computing Science, University of Oldenburg, D-26129 Oldenburg, Germany
国际会议
长春
英文
1-6
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）