Selective Transfer of Thin Film by Robotic Micromanipulation
(0) Micro -engineering is increasingly interested in the use of thin films, with a thickness of less than 20 nm. Before integrating these promising materials in complex Nano Electro Mechanical Systems (NEMS), their properties must he characterized. To do that, they must be transferred on specific substrates for analysis. Current manipulation techniques arc not suitable to transfer these thin films since they do not allow to select the parts of the object that must be manipulated and the quality of the sample is altered by traces of chemical residues. Tb perform the transfer of a selected thin film without modifying its properties, this paper presents a novel approach based on local gluing. This method has been validated by experiments performed on graphite films. Successful transfers of thin films of 1.2 x 1.7 u,m2 to 70 x 12 |im2 with an estimated thickness between 10 to 40 layers arc demonstrated. Limits of this technique arc discussed.
Bruno Sauvel Mohamed Boukhicha Adrian Balan Gilgueng Hwang Dario Tavema Abhay Shukla Sliphane Regnier
ISIR Universile Pierre el Marie Curie-Paris 6.CNRS-UMR 7222.Paris.France IMPMC Universile Pierre el Marie Curie-Paris 6.CNRS-UMR 7590.Paris.France LPN-CNRS Laboraloire de Pholonique el de Nanoslruclures.Sile Alcatel de Marcoussis.Marcoussis.France
国际会议
长春
英文
1-6
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）