A Probability Approach for On-line Tip Localization with Local Scan Based Landmark Sensing in Nanomanipulations
AFM based nanomanipulation has becoming a promising approach in developing devices and structures at nanoscale. One of the prerequisites for the effective and successful nanomanipulation is that the relative position between the AFM tip and the manipulated object can be controlled accurately. However this prerequisite is still hindered by the spatial uncertainties aroused from the PZT nonlinearity and thermal drift. This paper proposes a probability referenced tip localization method to solve these problems. The key idea is that the tip position is not only calculated from the applied PZT voltages, but also combined with the sensing information about the landmarks set in the sample surface. Furthermore, the uncertainties in the process of both tip motion and landmark sensing are described and considered in tip localization, which results in a higher positioning accuracy. In addition, the landmarks are selected from the features of sample surface, positioning error due to the thermal drift can be compensated automatically. Both the simulation and experimental results are presented to demonstrate the effectiveness and efficiency of the proposed method.
Shuai Yuan Lianqing Liu Zhidong Wang Ning Xi Yuechao Wang Zaili Dong Zhiyu Wang
State Key Lab.Robot., SIA., Chinese Academy of Sciences, Shenyang, 110016, China Shenyang Jianzhu Un State Key Lab.Robot., SIA., Chinese Academy of Sciences, Shenyang, 110016, China State Key Lab.Robot., SIA., Chinese Academy of Sciences, Shenyang, 110016, China Dept.of Advanced Ro State Key Lab.Robot., SIA., Chinese Academy of Sciences, Shenyang, 110016, China Dept.of Electrical State Key Lab.Robot., SIA., Chinese Academy of Sciences, Shenyang, 110016, China Graduate University
国际会议
长春
英文
1-6
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）