Dynamic Modeling and Position Error Analysis of XYθ H Type Stage

摘要：

The position errors in the precision stage have increased as the specimens size increased. The yaw error of the position error caused by synchronous error between tandem motors is dominant error in the H type stage. The rotatable stage with flexure joint mechanism can be thought to compensate the yaw error. This paper dedicated to determine dynamic model of rotatable stage. The position errors of the H type stage was analysed by HTM(Homogeneous Transformation Matrix).

作者: Kyoungchon Kim Daegab Gweon Hyungsuck Cho Dongpyo Hong

作者单位: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, K Department of Mechanical System Engineering, Chonbuk National University, Jeonju, Korea

会议类型: 国际会议

会议名称: The First International Conference on Manipulation,Manufacturing and Measurement on the Nanoscale(第一届3M-NANO国际会议)

会议地点: 长春

会议语种:英文

页码: 1-4

在线出版日期: 2011-08-29（万方平台首次上网日期，不代表论文的发表时间）