Theoretical Analysis of Eliminating Volume Scattering from Surface Scattering on Super-smooth Transparent Substrates

For characterizing super-smooth transparent substrates by the means of light scattering, volume scattering of substrates has great influence, so it must be eliminated completely. Polarization characteristics of surface scattering and volume scattering of super-smooth substrates have been theoretically analyzed in this paper. It has been found that polarization directions of electric vectors of surface scattering and volume scattering are different, for specific material of substrate, incidence angle and scattering angle. Specially, the difference is great when both incidence angle and scattering angle are large enough, which provides theoretical basis for eliminating volume scattering completely in the case of measuring surface scattering by the means of light scattering.
Kaiyong Yang Yun Zhao Xingwu Long Jianping Liu
Department of optoelectronic Engineering, College of Optoelectronic Science & Engineering, National Department of optoelectronic Engineering, College of Optoelectronic Science & Engineering, National
国际会议
长春
英文
1-6
2011-08-29(万方平台首次上网日期,不代表论文的发表时间)