Experimental Analysis of Laser Interferometry Based Robust Motion Tracking Control of a Flexure-Based Mechanism

摘要：

We present experimental analysis of laser interferometry realized closed-loop robust motion tracking for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry realized robust motion tracking control is established with experimental facility. Comparative error analysis for capacitive position sensor based system and laser interferometry realized system is discussed and presented at a length. With experiment and error analysis we offer evidence that the laser interferometry based closed-loop control can minimize positioning and tracking errors during dynamic motion.

作者: Umesh Bhagat Bijan Shirinzadeh Fatemeh Karimirad Julian Smith YanglingTian

作者单位: Robotics and Mechatronics Research Laboratory, Department of Mechanical Engineering, Monash Universi Monash Medical Centre, Department of Surgery, Monash University, Clayton, VIC 3800, Australia School of Mechanical Engineering, Tianjin University, Tianjin, 300072 China

会议类型: 国际会议

会议名称: The First International Conference on Manipulation,Manufacturing and Measurement on the Nanoscale(第一届3M-NANO国际会议)

会议地点: 长春

会议语种:英文

页码: 1-6

在线出版日期: 2011-08-29（万方平台首次上网日期，不代表论文的发表时间）