Design and Implementation of a Tuning-Fork Gyroscope with Low Thermoelastic Damping
This paper presents the design and implementation of a tuning-fork gyroscope with low thermoelastic damping (TED). Based on a numerical model of TED, a multiple-beam tuning-fork structure is designed with low TED in its two operation modes. A collection of electrostatic transducers are utilized to operate the tuning-fork structure. A simple yet robust one-mask fabrication process is employed to implement this gyroscope design on silicon-on-insulator (SOI) wafers. The highest measured Qs of the fabricated MBTFGs in vacuum are 255,000 in the drive-mode and 103,000 in the sense-mode, at a frequency of 15.7kHz. Under a frequency difference of 4Hz between the two modes (operation frequency is 16.8kHz) and a drivemode vibration amplitude of 3.0um, the measured rate sensitivity is 80μpp/°/s with an equivalent impedance of 2.5MΩ.The calculated overall rate resolution of this device is 0.37°/hr/VHz.
Ren WANG Peng CHENG Fei XIE Zhili HAO
Department of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, VA
国际会议
The 4th International Conference on Mechanical Engineering and Mechanics(第四届国际机械工程与力学会议)
苏州
英文
718-722
2011-08-11（万方平台首次上网日期，不代表论文的发表时间）