Effect of LaNiO3 Electrode on Crystallization of BaTiO3 Thin Films for Capacitors Prepared by Solgel Technique

摘要：

The conductive LaNiO3 (LNO) and ferroelectric BaTiO3 (BTO) thin films had been prepared by sol-gel method. The preparation process of LNO films had been optimized by studying on the effects of annealing temperature and film thickness on their properties and structures. The optimal annealing temperature of LNO films was 700 ℃. With the increment of film thickness, the surface resistivity of LNO films reduced. It was found that the LNO films, could induce the crystal orientations of BTO thin films, would greatly expand the application of ferroelectric films in the field of capacitors.

作者: Bin Li Chunqing Wang Weiwei Wu Wei Zhang Ying Zhong

作者单位: State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, School of Materials Science and Engineering, Harbin Institute of Technology at Weihai, Weihai 264209 State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001,

会议类型: 国际会议

会议名称: 2011 12th International Conference on Electronic Packaging Technology & High Density Packaging(2011 电子封装技术与高密度封装国际会议)

会议地点: 上海

会议语种:英文

页码: 357-360

在线出版日期: 2011-08-08（万方平台首次上网日期，不代表论文的发表时间）