Real-time Monitoring Technique for High Quality Holographic Grating

摘要：

The diffraction efficiency of diffraction grating lie on groove depth. In the course of exposure and development, the precision control groove depth of the holographic grating is more difficult. Based on refractive index of photoresist transforming in exposure process and groove evolving of photoresist grating in developing process, the diffraction efficiency changing was analyzed combining with electromagnetic field theory. The method for controlling groove depth of the holographic grating was presented. The relation between groove depth and diffraction efficiency in — 1 order shown below.

作者: Wenhao Li Jianxiang Gao Lijuan Wang Chengshan Zhang Peihua Duan

作者单位: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

会议类型: 国际会议

会议名称: 1st International Conference on Frontiers of Laser Processing(第一届激光加工前沿国际会议 ICFL 2011)

会议地点: 长春

会议语种:英文

页码: 128-129

在线出版日期: 2011-07-11（万方平台首次上网日期，不代表论文的发表时间）