Correctional technique on angle error in the manufacture of symmetric triangular groove shape metal grating

摘要：

As a special type of grating, symmetric triangular groove shape metal grating is applied to the moire fringe testing system, whose symmetric shape can increase brightness and contrast. In the manufacture of this grating, due to the structure and work character of the machine for ruled grating, the errors come from apex angle and two base angles are technical difficulties. Reverse certification method is presented. If the grating is irradiated by He-Ne Laser beam in auto-collimation, according to the ratio of energy of positive-negative diffraction order pair, we can evaluate the errors in apex angle and two base angles on symmetric triangular groove shape grating. This kind of symmetric triangular groove shape metal grating is fabricated, whose uniformity in experimental value and theoretical value of the apex angle and blaze angle grating is completed. The energy of positive-negative diffraction order pair is almost equal and the error is less than 1%. Practices have proved that the corrections of apex angle and blaze angle can make the balance of positive-negative diffraction order energy.

作者: Xiangdong QI

作者单位: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of ciences, Changchun 130033, China

会议类型: 国际会议

会议名称: 1st International Conference on Frontiers of Laser Processing(第一届激光加工前沿国际会议 ICFL 2011)

会议地点: 长春

会议语种:英文

页码: 131-132

在线出版日期: 2011-07-11（万方平台首次上网日期，不代表论文的发表时间）