The accurate method for removing misalignment errors from testing rectangular optics
The limitations of current interferogram reduction software with Zernike polynomials in analyzing rectangular inter-ferogram are illuminated. The Zernike polynomials are no longer orthogonal over an rectangular region and have no explicit physical meanings. The reasonable mathematical model for removing translation errors is established based on least squares fitting. The experiment is carried on with a 500mm 160mm aspherical mirror by nullcompensation. The misalignment errors can be eliminated from the original phase distribution exactly, thus the accurate surface map is gained. It provides a guarantee for the superprecision fabrication.
Xiao-kun WANG
Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences , Changchun 130033, China
国际会议
1st International Conference on Frontiers of Laser Processing(第一届激光加工前沿国际会议 ICFL 2011)
长春
英文
134-135
2011-07-11（万方平台首次上网日期，不代表论文的发表时间）