Using DLC buffer layer to improve the effect of surface modification of RB-SiC mirror by SiC coating

摘要：

A DLC buffer layer was used to improve the surface modification of RB-SiC mirror by SiC coating. The surface roughness of the RB-SiC mirror was reduced from 1. 397nm (rms) to 0. 774 nm (rms) by this method.

作者: Zhenfeng Shen Jinsong Gao

作者单位: Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 3888 Dongnanhu Road Changchun 130033, P.R.China

会议类型: 国际会议

会议名称: 1st International Conference on Frontiers of Laser Processing(第一届激光加工前沿国际会议 ICFL 2011)

会议地点: 长春

会议语种:英文

页码: 171-172

在线出版日期: 2011-07-11（万方平台首次上网日期，不代表论文的发表时间）