High Precision Control for Nano-Positioner Actuated by Smart Materials
The nano-positioner is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the positioner is a challenging task. This paper discusses the high precision adaptive control for the positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
CHEN Xinkai
Shibaura Institute of Technology, Minuma-ku, Saitama 337-8570, Japan
国际会议
The 30th Chinese Control Conference(第三十届中国控制会议)
烟台
英文
1-6
2011-07-01（万方平台首次上网日期，不代表论文的发表时间）