A Survey of Run-to-Run Control Algorithms for High-mix Semiconductor Manufacturing Processes

摘要：

The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process engineers. Many different methods have been proposed to improve control performance of the high-mix system. In this paper,an overview of the recent control algorithms for high-mix system is presented. The thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in detail. Further research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.

作者: MA Ming-Da ZENG Xian-Lin DUAN Guang-Ren

作者单位: Center for Control and Guidance Technology,Harbin Institute of Technology,Harbin 150001,P.R.China

会议类型: 国际会议

会议名称: The 30th Chinese Control Conference(第三十届中国控制会议)

会议地点: 烟台

会议语种:英文

页码: 1-6

在线出版日期: 2011-07-01（万方平台首次上网日期，不代表论文的发表时间）