Multi-Degree-of-Freedom Motion Control of Ultra-precision Stage

摘要：

In this paper,a ultra-precision multi-degree-of-freedom stage is introduced,which consists of fine-stage based on Lorentz planar motor and rough-stage based on linear motor,and is suspended with air bearings.Based on the structure of stage,the dynamic model of fine-stage is designed,and the strategy of decouple control is presented correspondingly.A control method rough-stage following fine-stage is designed to satisfy the long stroke and high-precision performances.The above method is argued by field experiments,which demonstrates that the structure of stage and the control method can realize the performances of high-speed,long stroke and ultra-precision.

作者: TENG Wei GAO Qingfeng WU Xin LIU Yibing

作者单位: School of Energy Power and Mechanical Engineering,North China Electric Power University,Beijing 102206,P.R.China

会议类型: 国际会议

会议名称: The 30th Chinese Control Conference(第三十届中国控制会议)

会议地点: 烟台

会议语种:英文

页码: 1-4

在线出版日期: 2011-07-01（万方平台首次上网日期，不代表论文的发表时间）