Evaluation on Structure and Tribological Properties of Carbon Nitride Films Deposited on YG8 Carbide Alloy Substrates

摘要：

CNx films were deposited on YG8 carbide alloy (WC+8%Co) substrates by DC or RF magnetron sputtering. The composition, bonding state, adhesion, and tribological behavior of CNx films were researched. X-ray Photoelectron spectroscopy results showed that C-N, C=N and CN bond existed in CNx films. RF magnetron sputtering is in favor of the bonding of C and N, the adhesion and the wear resistance of CNx films. DC magnetron sputtering is in favor of lubricating ability of CNx films. Substrate bias has some effect on the bonding of C and N, the adhesion of the films, decrease of adhesive wear and the friction coefficient of films.

作者: Jun LIU Zhigang CHEN Kai BI Yuemin WANG

作者单位: School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China

会议类型: 国际会议

会议名称: The Second Annual Meeting on Testing and Evaluation of Inorganic Mateirals(第二届全国无机材料测试与评价学术年会 TEIM-2)

会议地点: 长沙

会议语种:英文

页码: 80-84

在线出版日期: 2011-06-30（万方平台首次上网日期，不代表论文的发表时间）