Preparation of Si-C-N-0 Amorphous Films from A Polysilazane by Heat Treatment at High-Temperatures

摘要：

Si-C-N-O amorphous films were fabricated at about 800℃ by pyrolysis of polyvinylsilazane precursor films in a vacuum oven under N2 flow. The polymer precursor films were prepared onto Si wafers by spinning from a solution of the polymer. The compositions of the as-prepared films were confirmed by X-ray diffraction, Fourier transformation infrared spectroscopy, and x-ray photoelectron spectroscopy. SEM analysis indicated that the films can be formed with thickness more than several micrometers, and very smooth surfaces. Such films will be promising in application of protecting equipments in high-temperature, corrosive and wear environments.

作者: Guanglei Hou Zhijian Peng Zhiqiang Fu Wen Yue Chengbiao Wang

作者单位: School of Engineering and Technology, China University of Geosciences, Beijing 100083, China

会议类型: 国际会议

会议名称: The Second Annual Meeting on Testing and Evaluation of Inorganic Mateirals(第二届全国无机材料测试与评价学术年会 TEIM-2)

会议地点: 长沙

会议语种:英文

页码: 151-154

在线出版日期: 2011-06-30（万方平台首次上网日期，不代表论文的发表时间）