Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO2 Thin Films
Crystalline anatase TiO2 thin films were obtained on glass substrates at 60℃, 75℃ and 90℃, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO2 thin films. The H2 sensing properties of the TiO2 thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO2 thin films obtained at deposition temperature of 60℃ exhibited the maximum H2 gas response at 350℃, and the magnitude of the sensor signal and the response time for 500ppm H2 was 1.25 and 17s, respectively.
Fujian Ren Yi Sun Liang Huang Yunhan Ling Jiayou Feng
Advanced Materials Laboratory, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, P.R.China
国际会议
长沙
英文
300-303
2011-06-30（万方平台首次上网日期，不代表论文的发表时间）