Diffusion Coefficient Measurement by Grazing Incidence X-ray Reflection in a Mo/Si Multilayer

摘要：

We present a diffusion study at 250℃ on the formation of intermixing zones between periodic, nanometer thick films consisting of Mo and Si. A Xray diffraction method at pm-accuracy was developed, and diffusion coefficient was determined to be 2. 9× 10-22cm2/s. Extended abstract Diffusion coefficients in thin films at relatively low temperatures(typically a few hundred degrees) are generally lower than10-23

作者: Bo Yu Chunshui Jin

作者单位: ChangChun Institute of Optics,Dongnanhu Road 3888,ChangChun, PRC

会议类型: 国际会议

会议名称: International Conference on Micro/Nano Optical Engineering (纳米光学工程国际会议 ICOME 2011)

会议地点: 长春

会议语种:英文

页码: 37-38

在线出版日期: 2011-06-12（万方平台首次上网日期，不代表论文的发表时间）