The Investigation of Point Defect Modes in Silicon Phononic Crystal Plate

摘要：

The point defect cavity in silicon phononic crystal plate was investigated in this paper, including its micro fabrication, vibration pattern and its frequency sensitivity to tiny mass loading.

作者: Jun Liu Feng Li Yihui Wu

作者单位: Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130 Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130

会议类型: 国际会议

会议名称: International Conference on Micro/Nano Optical Engineering (纳米光学工程国际会议 ICOME 2011)

会议地点: 长春

会议语种:英文

页码: 87-88

在线出版日期: 2011-06-12（万方平台首次上网日期，不代表论文的发表时间）