Fabrication of High-efficiency Ultraviolet Blazed Gratings by Use of Direct Ion-beam Etching Through a Rectangular Photoresist Mask

摘要：

With the direct ion-beam etching method and the etching process simulation, we have fabricated UV blazed gratings with a 1200 line/mm groove density, 4. 5° blaze angles and 1 800 line/mm groove density, 5. 5° blaze angles. Extended abstract In ultraviolet spectroscopy,there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order, so it is the optimum

作者: Xin Tan

作者单位: Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun, 130033,China

会议类型: 国际会议

会议名称: International Conference on Micro/Nano Optical Engineering (纳米光学工程国际会议 ICOME 2011)

会议地点: 长春

会议语种:英文

页码: 160-161

在线出版日期: 2011-06-12（万方平台首次上网日期，不代表论文的发表时间）