Digital Concatenated Grating Fabricated by Nanoimprint Lithography

摘要：

Digital concatenated grating (DCG) reflectors are promising for improvements on widely tunable distributed Bragg reflector (DBR) lasers. DCG has been successfully fabricated by using soft stamp ultraviolet nanoimprint lithography for the first time. Extended abstract Nanoimprint lithography (NIL) has been widely investigated since it has been proposed by Chou et al.

作者: Yichao Tang Jialin Zhao Yiwen Zhang Yonglin Yu Ning Zhou Wen Liu

作者单位: Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Hu Accelink Technologies Co. Wuhan, 430074, China Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Hu

会议类型: 国际会议

会议名称: International Conference on Micro/Nano Optical Engineering (纳米光学工程国际会议 ICOME 2011)

会议地点: 长春

会议语种:英文

页码: 171-172

在线出版日期: 2011-06-12（万方平台首次上网日期，不代表论文的发表时间）