Annealing Effect on the Performance of Sputtering Deposited Metglas Thin Films
Magnetostrictive sensors based on ferromagnetic materials have been widely used in detecting chemicals and biological species. The MetglasTM 2826MB is one of the bulk strip materials that is employed as the sensor platform. However, the sensitivity is limited by the large size of the sensors itself, hi order to improve the sensitivity, we have developed a process to fabricate microscale sensors of 500 x 100 urn in size using conventional MEMS technology. As-deposited, the sensors suffered from internal stress, which was released by a annealing the sensors at 215 ℃ for two hours under vacuum condition. The annealing process improved the magnetic properties of the thin films and increased the resonant frequency of the sensor by 214 kHz.
Liang Cai Jing Hu Bart Prorok Chinthaka Gooneratne Jurgen Kosel
Physical Science and Engineering Division,King Abdullah University of Science and Technology,Saudi A Materials Science and Engineering,Changzhou University,China Materials Engineering,Auburn University,USA
国际会议
5th International Conference on Nanomaterials by Severe Plastic Deformation(第五届剧烈塑性变形纳米材料国际会议)
南京
英文
1207-1212
2011-03-01（万方平台首次上网日期，不代表论文的发表时间）