Laser inspection for surface acoustic wave performance in SAW device

摘要：

Unlike the electric method capable of checking only product defect, the real time optical metrology is suggested for measuring and visualizing vibration with respect to position of surface acoustic wave in RF device. The measuring limits and conditions for surface acoustic wave are given, and the interference and diffraction due to RF signal are analyzed by optical interpretation. A single mode laser and a 105MHz-center-frequency repeater filter were employed for experiments and theoretical analysis. In this paper, the optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

作者: Won Kweon Jang Jun Oh Park

作者单位: Division of Electronic, Computer and Communication Engineering, Hanseo University

会议类型: 国际会议

会议名称: Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

会议地点: 上海

会议语种:英文

页码: 284-285

在线出版日期: 2010-12-08（万方平台首次上网日期，不代表论文的发表时间）