MOEMS Gyroscope based on acoustooptic mode coupling

摘要：

A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0-400deg/s.

作者: Shu-xiang Lu Shu-fen Chen Yi Zhao

作者单位: Department of Opto-Electronics Engineering, Beijing Institute of Technology, Beijing 100081,China

会议类型: 国际会议

会议名称: Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

会议地点: 上海

会议语种:英文

页码: 292-293

在线出版日期: 2010-12-08（万方平台首次上网日期，不代表论文的发表时间）