3D Fabrication of Waveguide and Grating Coupler in SU-8 by optimized Gray Scale Electron Beam Lithography

摘要：

Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.

作者: Lin Dong Srinivasan Iyer Sergei Popov Ari Friberg

作者单位: Royal Institute of Technology, Division of Optics, SE-164 40 Kista, Sweden Royal Institute of Technology, Division of Optics, SE-164 40 Kista, Sweden Helsinki University of Te

会议类型: 国际会议

会议名称: Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

会议地点: 上海

会议语种:英文

页码: 542-543

在线出版日期: 2010-12-08（万方平台首次上网日期，不代表论文的发表时间）