Surface finish of micro die by ion beam irradiation for micro punching
Micro-forming is well suited to fabricate micro-parts with features in sub-millimeter range, in particular for mass production with low cost. Since the dimension of micro-parts is too small, non-contact surface finish processes of micro die become important issues for micro-forming technology. In the paper, the micro punch was fabricated with good dimensional accuracy by precision micro-grinding. However, the surface quality of micro punch was not satisfied the demands of micro-forming technology due to the high surface roughness value. Surface finish of micro punch was carried out with high-energy ion beam irradiation by Electron Cyclotron Resonance (ECR) equipment with Ar plasma. The results show that the surface roughness Ra value of micro punch is decreased from sub-micron to nano-scale and the profile accuracy is improved significantly with surface finish by ion beam irradiation. Micro punching process was carried out with the micro punch finished by ion beam irradiation. The results show that the micro hole of 0.4mm in diameter was manufactured with good dimensional accuracy and the surface roughness of micro inner hole was decreased from 0.22 μm to 37 nm. Therefore, surface finish technology by ion beam irradiation is surface treatment technology with non-contact and non-damage, which is very effective to improve the surface quality of micro forming die.
Xu Jie Shan Debin Wang Chunju Guo Bin
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin In Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin In
国际会议
桂林
英文
1-6
2010-11-16（万方平台首次上网日期，不代表论文的发表时间）