Numerical Simulation of High-aspect-ratio Micro-hole Electroforming with External Magnetic Field

摘要：

In this paper, the influences of applied magnetic field on flow state during electroforming of the high-aspect-ratio (HAR) blind micro-hole were numerically analyzed using the Fluent software. The results showed that, when microelectroforming of nickel without external agitation, three vortexes could form due to the magnetohydrodynamic (MHD) effect within the HAR micro-hole with magnetic field in parallel to cathode-electrode surface, and the flow rate in the micro-hole increased with the increase of the magnetic field and current density. The MHD effect helped to enhance mass transfer during the microelectroforming of HAR microstructures.

作者: Wei Li Pingmei Ming Wuji Jiang Yinding Lv

作者单位: Henan Polytechnic University, Jiaozuo 454003, China zhongshan poly technic, Zhongshan 528404, China

会议类型: 国际会议

会议名称: 第八届中日机械技术史及机械设计国际会议

会议地点: 河南焦作

会议语种:英文

页码: 1-4

在线出版日期: 2010-10-31（万方平台首次上网日期，不代表论文的发表时间）