The Preparation and Characterization of the Ag/SiOx Nanocomposite by ICP and Magnetron Sputtering
In this work, Ag/SiOx nanocomposites were successfully synthesized by inductively coupled plasma(ICP) assisted magnetron sputtering technology. We used hexamethyldisiloxane (HMDSO) as the monomerand Ar as a diluted gas for the SiOx deposition when Ag nanoparticles were sputtered by Ar ions from thesilver target in simultaneity. Fourier transform infrared spectroscopy (FTIR) and ultraviolet visible spectroscopy(UV-Visible) were utilized to analyze the structures of Ag/SiOx nanocomposites. In the UV-vis spectruma single peak at ca. 420 nm, corresponding to the surface plasmon resonance absorption of silver nanocolloids,was clearly indicated, which means Ag particles embedded in nanocomposites were in nano-scale.The morphology was characterized by atomic force micrograph (AFM) and scanning electron microscopy(SEM). Results show that the surface of nanocomposite was smooth and uniform. The size, status and distributionof Ag particles were also investigated by high resolution transmission electron microscopy (HRTEM)and x-ray diffraction (XRD), respectively. The influence of experimental parameters on the microstructures ofnanocomposites, such as ICP power, deposition time, the ratio of monomer to Ar and working pressure, werealso investigated in this paper.
Huiqin Zhu Zhengduo Wang Zhongwei Liu Qiang Chen
Laboratory of Plasma Physics and Materials Beijing Institute of Graphic Communication Beijing, China
国际会议
The 17th IAPRI World Conference on Packaging(第17届世界包装大会)
天津
英文
575-578
2010-10-12（万方平台首次上网日期，不代表论文的发表时间）