Properties of SiOx Barrier Layer Prepared by Magnetized Plasma Enhanced Chemical Vapor Deposition at Roll-to-Roll Process

摘要：

The properties of SiOx barrier layer deposited on PET surface by magnetized plasma enhancedchemical vapor deposition in the roll-to-roll process were studied. The barrier properties of the coatingswere measured by oxygen transmission rate. The composition and structure of coatings were analyzed byFourier transform infrared (FTIR), and the surface morphology was characterized via atomic forcemicroscope (AFM). At optimal process conditions the minimum OTR value of SiOx coated PET substrateis 0.725 cc/cm2-day (the control PET film is 130 cc/m2-day).

作者: S.Y.Zhang D.Z.Wang Z.W.Liu Q.Chen

作者单位: Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication Beijing, China

会议类型: 国际会议

会议名称: The 17th IAPRI World Conference on Packaging(第17届世界包装大会)

会议地点: 天津

会议语种:英文

页码: 579-581

在线出版日期: 2010-10-12（万方平台首次上网日期，不代表论文的发表时间）