Research on Probe Calibration System for Tactile Probe in Micro/Nano Dimension Measurement
(0) Tactile probe is a very usefull tool and is an important part of the nano/micro dimension measurement system or instrument in the fields of mechanical manufacture, precision engineering, semiconductor industry and so on. In order to test and calibrate the probe parameters such as the resolution, the sensitivity and the stability, we establish the probe calibration system. It contains the 3D displacement stages, 1D fine adjustment stage with the piezoelectric ceramic (PZT) and the support stent to clamp and fix the probe. The 3D displacement stages adjust the coarse position, while the PZT decides the precision position and provides different displacements for the probe. The fine adjustment stage is with the uncertainty of 5 nm, the resolution of 0.2 nm, and the range of 12 μm. This probe calibration system can be used for many kinds of tactile probes such as 1D probe, 2D probe, 3D probe and probes of different work principles. This paper introduces the setup, explains the work principle and carries out the basic experiment results. We analyze the experiment results, judge the probe performance and make plans for the future research on the probe calibration system.
Lihua Wang Yuan Li Hong Wang Xin Chen
Shanghai Institute of Measurement and Testing Technology, Shanghai, China, 201203 Shanghai Jiao Tong University, Shanghai, China, 200240
国际会议
天津
英文
1-4
2010-09-24（万方平台首次上网日期，不代表论文的发表时间）