Investigation of Electrohydrodynamics Forming Micro Structures with UV Cured Materials
Electrohydrodynamics forming micro structures with UV light cured materials at room temperature was investigated in this paper. Homogeneous electrical field was applied on the doped silicon wafer which was pre-spin coated with polymer thin film, and periodic pillars with micron-scale size could be regularly formed in large area. According to the linear stability analysis method, the size of structures was greatly affected by the permittivity of polymer thin film, and it was also proved by the results of electrohydrodynamics patterning experiments. The component with high permittivity such as polar group was added into the UV light cured polymer. Through observing the periodic pillars by optical microscopy, we found that the dimension of the pillars was greatly decreased in the same experimental parameters. The dynamic viscosity was one of the key factors for the evolution time of electrohydrodynamics patterning process. The dynamic viscosity of UV light cured polymer at room temperature was much lower than the thermoplastic polymer in molten stage, thus, the evolution time in experiment was dropped to less than one hour from over one day in experiment using thermoplastic polymer.
Xin Li Yucheng Ding Jinyou Shao Hongzhong Liu
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
国际会议
天津
英文
1-8
2010-09-24（万方平台首次上网日期，不代表论文的发表时间）