Six-DOF Nano-Precision Microstage Electromagnetic Field Calculation
Without the friction and vibration, magnetic levitation microstage is applied in the ultra-precision positioning system. This paper proposes a novel six degrees of freedom maglev microstage. The microstage bearing unit and actuating unit are designed in the same structure. By applying analytical and numerical methods, the microstage electromagnetic field model is established respectively. On this basis, the magnetic field distribution and electromagnetic force expression under the special structure constraint is researched. The nonlinear analysis between electromagnetic force and motion position is investigated. The results showed that the microstage has a good linear pattern in the moving range of 0.5mm～1.5mm. The six-DOF microstage presented in this paper has advantages of compact structure, large travel range, and nanometre accuracy. It may also be applied in the ultra-precision positioning system of our property rights lithography machines.
LI Guang ZHU Yu ZHANG Ming DUAN Guanghong Masayoshi Tomizuka
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China Mechanical Engineering Department, University of California Berkeley, CA 94720, USA
国际会议
天津
英文
1-4
2010-09-24（万方平台首次上网日期，不代表论文的发表时间）