Research on the New Generation of Ion Beam Figuring System for Ultra-precise Optical Elements
Ion beam figuring (IBF) is a novel technology for Ultra-precise optical elements. Material is removed from optic surface in atomic or molecular form by physical sputtering. Due to non-contact between the tool and the work piece, the edge-effect and tool-wear problems involved in the conventional process are avoided. Ion beam figuring process is of high determinacy and of high efficiency. All these properties make ion beam figuring be one of promising methods for mirrors of high precision. In this article, the new generation ion beam figuring system which contains doubled vacuum chambers is set up. Optical elements can be exchanged by a transport vehicle shuttling between the two vacuum chambers, without opening the primary vacuum chamber and waiting ion source cooled completely, which increasing the efficiency greatly. High Performance Processing Robot which has three liner axes and two angular axes of motion, providing 5 axis ion source positioning capability with a high accuracy. The angle can up to 50°to figure very steep spherical and aspheric surfaces. Then, Removal function, studied by experimental method, has the near Gaussian-shaped and is stable extremely for long time. At last, ultra-precise surface is obtained after figuring a sample optical element, which proved that the ion beam figuring system is favourable for figuring process.
YUAN Zheng DAI Yi-fan XIE Xu-hui ZHOU Lin
School of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China
国际会议
天津
英文
1-5
2010-09-24（万方平台首次上网日期，不代表论文的发表时间）