Applying Technique of Sacrificial Layer for the Fabrication of Microfilter

摘要：

Biochip plays an important role in biotechnology andmany scientists also pay a lot of attention on this product. Thus,in this study we used MEMS and sacrificial layer techniques tomanufacture the microfilter. It only depends on differentdevelopment properties of the positive and negative photoresists.The feature size of filtration can be precisely controlled by thethickness of sacrificial layer. The main materials for this studyare just photoresists, such as negative photoresist SU-8 andpositive photoresists AZ4620 and RP4000. The fabricationprocess was carried out in the yellow room. Compared with thetraditional micromachining methods such as bulkmicromanufacturing, surface micromachining and the LIGAprocess, this proposed design and fabrication of microfilter havemany advantages including economical fabrication cost and highyield.

作者: Yaw-Jen Chang Tat Yan Chan Jia-Hao Wang

作者单位: Department of Mechanical Engineering, Chung Yuan Christian University 200, Chung Pei Rd., Chung Li, Taiwan 32023, R.O.C.

会议类型: 国际会议

会议名称: The 4th International Conference on Bioinformatics and Biomedical Engineering(第四届IEEE生物信息与生物医学工程国际会议 iCBBE 2010)

会议地点: 成都

会议语种:英文

页码: 1-3

在线出版日期: 2010-06-18（万方平台首次上网日期，不代表论文的发表时间）