Servo Loop Design of Capacitive MEMS Accelerometer under High Preload Voltage

摘要：

As a MEMS sensor working in the force feedback capacitive accelerometer system, the sensing mass of MEMS sensor is driven by the external acceleration, the differential modulating pulse voltage and the preload voltage. Under high preload voltage, the common servo loop design method of the capacitive MEMS accelerometer is invalid since the open loop system features cant be obtained by experiments. The local closed-loop method for the aforementioned problem is proposed in this paper. Based on this method, the servo loop of the MEMS accelerometer under high preload voltage is designed. The tested results indicate that the local closed-loop method greatly improve the performance of the accelerometer.

关键词： Capacitive MEMS accelerometer Servo loop Preload voltage Local closed-loop

作者: Da Fan Minjie Liu Yunfeng Liu Changde Zhao Jingxin Dong

作者单位: Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China

会议类型: 国际会议

会议名称: 2011 China Control and Decision Conference(2011中国控制与决策会议 CCDC)

会议地点: 四川绵阳

会议语种:英文

页码: 1341-1344

在线出版日期: 2011-05-23（万方平台首次上网日期，不代表论文的发表时间）