PRELIMINARY STUDY OF THE MEASUREMENT OF THERMAL CONDUCTIVITY OF FLUIDS WITH A MICRO-BEAM MEMS SENSOR
A preliminary study was conducted to develop a novel technique to measure the thermal conductivity of fluids using a micro-beam MEMS sensor. The objective of the present study was to demonstrate the feasibility of the measurement, which we have proposed on the basis of a numerical simulation, using a prototype sensor. The principle of the measurement is to determine the thermal conductivity of the sample from measured temperature rise of the sensor at a steady state, using a predetermined relationship between the dimensionless temperature rise and the thermal conductivity. A 9.6-μm long platinum sensor bridging over a 7.3-μm deep trench was fabricated on a silicon chip. The sensor was heated within a sample, FC-72 or the air, at controlled ambient temperatures. It was confirmed that the temperature of the heated sensor did not vary with time after an initial rise, indicating that the natural convection did not occur around the micro sensor. The dimensionless temperature rise of the sensor that was obtained at several heating powers was independent of the heating power, and approximately 70 ％ higher for air than that for FC-72, of which thermal conductivity was 2.2 times as large as that of the air. The micro-beam sensor was therefore proved to be useful for the new technique for the measurement of the thermal conductivity of fluids.
Hiroshi Takamatsu Toshiyuki Tanaka Yusaku Furuya Satoru Uchida Kosaku Kurata Koji Takahashi
Department of Mechanical Engineering Kyushu University Fukuoka, Japan, 819-0395 Department of Aeronautics and Astronauts Kyushu University Fukuoka, Japan, 819-0395
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
183-188
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）