STUDIES ON THE THERMAL AND OPTICAL PROPERTIES OF VANADIUM OXIDES FILMS USING THE THERMO-REFLECTANCE METHOD AND SPECTROSCOPIC ELLIPSOMETRY
The V2O5 films were prepared by a RF sputtering method and theVO2 film was obtained from post-annealed V2O5 film. The structural, optical and thermal properties were investigated by the XRD, SEM, spectroscopic ellipsometry, measurement of transmittance and thermo-reflectance method. The optical constants of the amorphous and crystalline V2O5 films and VO2 film with the polycrystalline structure were obtained by the fit using the TNA dispersion formula. Also, it was confirmed that the spectra of complex refractive index of the V2O5 films are greatly affected by the variation of crystalline structure. The optical constants of the V2O5 and VO2 films below and above transition temperature were obtained by the fitting using the TNA dispersion formula, and it was found that the phase transition of the crystalline V2O5 film happened at temperature between 250℃ and 300℃. The phase transition of the VO2 film occurred around 70℃, and the result obtained by the transmittance agreed well with that by the ellipsometry. The thermal conductivities of V2O5 films with the amorphous and crystalline structures are 0.92 W/mK and 0.93 W/mK at room temperature, respectively. Also, the thermal conductivity of VO2 film is found to 1.40 W/mK and the value is lager about 0.47 W/mK than that of the crystalline V2O5.
Man Il Kang InGoo Kim Eunji Oh Sok Won Kim Ji Wook Ryu Hyo Youl Park
Department of Physics University of Ulsan Ulsan, Korea, 680-749 Department of Physics Kongju National University Kongju, Korea, 314-701 Electronics and Communication Semiconductor Applications Ulsan College Ulsan, Korea, 680-749
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
241-247
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）