DEVELOPMENT OF NANOMETER SCALE TEMPERATURE MEASUREMENT METHOD BY POLARIZED NEAR-FIELD LIGHT
Recently, the measurement of the temperature distribution at nanometer scale is important for the thermal design of the highly integrated electric devices. However, the spatial resolution of the conventional optical measurement techniques is limited by the diffraction limit of light, which is approximately half of the wavelength of the optical beam. Therefore, we have developed a novel optical method for measuring the temperature and the thermophysical properties in nanometer scale by the polarized near-field light, namely Polarized Near-field Optics Thermal Nanoscopy (P-NOTN). This method has nanometer scale spatial resolution (up to 10 nm), because the near-field light is not subject to limitation of the diffraction limit of light. P-NOTN enables high resolution, high sensitivity, non-contact, and in situ measurement of temperature of nanometer scale devices and materials. In this paper, the details of the measurement principle of P-NOTN are mentioned, and the applicability of P-NOTN is confirmed experimentally. First, the result of preliminary measurement using the samples which has refractive index distribution is reported. Second, the result of temperature distribution measurement using the molybdenum wire heater which is 500 nm in width and 100 nm in thickness is reported. We successfully detected the information of the sample, and the capability of measuring the temperature and the thermophysical properties is demonstrated.
Shunsuke Hosaka Toshiaki Kasakake Yoshihiro Taguchi Toshiharu Saiki Yuji Nagasaka
School of Integrated Design Engineering Keio University 3-14-1, Hiyoshi, Yokohama, Kanagawa 223-8522 Department of System Design Engineering Keio University 3-14-1, Hiyoshi, Yokohama, Kanagawa 223-8522 Department of Electronics and Electrical Engineering Keio University 3-14-1, Hiyoshi, Yokohama, Kana
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
594-599
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）