MULTIHARMONICS METHOD CHRATERIZING IN-PLANE THERMAL CONDUCTIVITY AND TBR OF SEMICONDUCTOR NANOFILM ON SUBSTRATE: THEORETICAL ANALYSIS
The in-plane thermal conductivity of semiconductor nanofilm is difficult to be tested due to suspension problem. The thermal boundary resistance (TBR) plays a key role in semiconductor nanoscale structures and nanoscale thermal experiments. By applying AC and DC currents simultaneously on the semiconducting nanofilm on highly insulated substrate, multiple harmonics including 1ω, 2ω and 3ω signals origin from the self-heating of nanofilm. The thermal boundary resistance is introduced into the heat diffusion equation in in-plane direction. The expression of temperature oscillation and theoretical analysis of heat transport process show that the in-plane thermal conductivity and TBR can be decoupled from the multiple harmonics in frequency-domain. Thermal analysis justifies the multiharmonics method according to the effect of in-plane thermal conductivity, TBR between nanofilm and insulated substrate, resistance coefficient of semiconductor nanofilm on temperature oscillation at low frequency. Results show the multiharmonic method sensitivity variations depending on the TBR, the in-plane thermal conductivity, and the electric current frequency.
Zhaoliang Wang Dawei Tang
Thermal Engineering and Power Department China University of Petroleum Dongying, China, 257061 Institute of Engineering Thermophysics Chinese Academy of Science Beijing, China, 100080
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
690-694
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）