TRACEABLE THERMOPHYSICAL PROPERTY DATA OF THIN FILMS AND BOUNDARY THERMAL RESISTANCE BETWEEN THIN FILMS –THEIR MEASUREMENTS AND DATABASE-
Recently, importance of thermal design is increasing in order to support efficient development of advanced products such as semiconductor devices. Generally, the reliability of thermal design depends not only on simulation technique but also on reliability of thermophysical properties used as input information into the simulation. Especially thermophysical properties of thin films and boundary thermal resistances are key information for thermal design for devices such as CPU, memory, storage and LED. NMIJ has been developing measurement methods and standards for thermophysical properties of thin films based on thermoreflectance technique. National Metrology Institute of Japan (NMIJ)/ of National Institute of Advanced Industrial Science and Technology (AIST) has been developing network database system for thermophysical properties data since 1997 in order to supply reliable thermophysical properties data including thin film data. The database system is available for free via internet (http://riodb.ibase.aist.go.jp/TPDB/AJAX/). Thermophysical property database was improved for storage of material information such as, structure corresponding to crystal structure, grain size, scanning electron microscope image, to identify multilayer structure of thin films and traceability of thermophysical properties data. Thermophysical properties of thin film and boundary thermal resistances is expected to be accumulated and analyzed systematically using this improved database system.
Yuichiro Yamashita Tetsuya Baba
National Metrology Institute of Japan National Institute of Advanced Industrial Science and Technology Tsukuba, Ibaraki, Japan, 305-8563
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
923-928
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）