DEVELOPMENT OF ULTRA FAST LASER FLASH METHODS FOR MEASURING THERMOPHYSICAL PROPERTIES OF THIN FILMS AND BOUNDARY THERMAL RESISTANCES
Reliable thermophysical property values of thin films are important to develop advanced industrial technologies such as highly-integrated electric devices, optical disks, magneto-optical disks, and thermoelectric devices. In order to meet these requirements, the National Metrology Institute of Japan of the National Institute of Advanced Industrial Science and Technology (NMIJ/AIST) has developed ultra fast laser flash methods by picosecond pulse heating and nanosecond pulse heating under the same geometrical configuration to the laser flash method which is the standard method to measure thermal diffusivity of bulk materials. Since these pulsed light heating methods observe one-dimensional heat diffusion across well-defined length of the specimen thickness, thermal diffusivity values across thin films were measured with small uncertainty. Using these pulsed light heating thermoreflectance methods, the thermal diffusivity of each layer of the multilayered thin films and the boundary thermal resistance between the layers can be determined from the observed transient temperature curves based on the response function method. Thermophysical properties of various thin films important to modern industries such as the transparent conductive films used for flat panel displays, hard coating films and multilayered films of next generation phase-change optical disk have been measured by these methods.
Tetsuya Baba Naoyuki Taketoshi Takashi Yagi
National Metrology Institute of Japan National Institute of Advanced Industrial Science and Technology Tsukuba, Ibaraki, Japan, 305-8563
国际会议
The Ninth Asian Thermophysical Properties Conference(第九届亚洲热物理性能会议 ATPC 2010)
北京
英文
1353-1362
2010-10-19（万方平台首次上网日期，不代表论文的发表时间）