Fabrication of a high density, high aspect ration and flexible metal/polymer mold with flexible polymer material
A flexible polymer is considered as an alternative of lowcost mold materials. Molds with a high density aspect ratio, smooth surface, vertical sidewalls and lightweight have been fabricated and it is easy-to-use features in the hot embossing process. The fabricated flexible metal/polymer molds are expected to have the same quality as silicon or Ni-mold has. This also indicated that the flexible metal/polymer mold could be used for thermoplastic polymer patterning with high fidelity and low cost. Using the flexible metal/polymer mold, 10um and 5um structures were fabricated.
Lu Haijing Ang Xiao Fang Liu Hongping Sun Zheng Wei Jun
Singapore Institute of Manufacturing Technology 71 Nanyang Drive Singapore 638075
国际会议
西安
英文
839-842
2010-08-16（万方平台首次上网日期，不代表论文的发表时间）