A Novel Approach to Fabricate Glass Micro-objects for MEMS Application
A novel foaming process to fabricate wafer-level micro glass objects including bubbles and runners for MEMS packaging was studied. Firstly shallow cavities were wet etched fast on the surface of a silicon wafer. CaCO3 powders were placed in the silicon cavities. Then the cavities were sealed with a glass wafer by anodic bonding. The bonded wafers were then heated up, and the gas released by CaCO3 foamed the glass into cylindrical channels or spherical bubbles according to the pattern in silicon substrate. Results show that the wafer level glass spherical cavities and glass channels by hot forming process are fabricated successfully. The objects on silicon wafer are from 2000μm to 100μm in diameter. After hot-forming process the diameter of micro glass spherical objects are approximately from 3500μm to 130μm in diameter. A theoretical model of the foaming process was discussed as well as the potential applications of the micro glass objects. This process was used to fabricate low-cost micro glass cavities including channels and bubbles with a cylindrical or spherical shape and a smooth internal surface for applications of micro reactors, analytical and bioanalytical applications, and MEMS packaging.
glass cavity runner foam MEMS cavity
Boyin Chen Jintang Shang Di Zhang Chao Xu Junwen Liu Xinhu Luo Hui Yu Jingdong Liu
Key Laboratory of MEMS of Ministry of Education, Southeast University Sipailou 2, Nanjing, Jiangsu, China, 210096,
国际会议
西安
英文
916-920
2010-08-16（万方平台首次上网日期，不代表论文的发表时间）