Atomic Vapor Cell Fabrication for Atomic Clock Based on Vacuum Packaging by Multi-stack Anodic Bonding Using Two Electrodes
Miniaturized atomic clock that could provide the most stable frequency reference is demanded strongly in a large number of applications such as communication, satellite navigation and science measurement etc. The miniaturization is mainly developed by CPT phenomenon which depends on the miniaturized atomic vapor cell without microwave cavity. With the rarely reported triple-stack anodic bonding in MEMS packaging, we developed a method based on vacuum packaging to conduct the glass-silicon-glass anodic bonding using two electrodes for atomic vapor cell fabrication. Furthermore we developed a setup specially for the vapor cell. Some samples with the alkali metal rubidium were made through this setup. Tensile testing showed the bonding strength is above 10MPa, and spectrum analysis demonstrated the alkali metal was well sealed.
Jian Xu Tingkai Zhang Zhiyin Gan Sheng Liu
Division of MOEMS, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Beijing Aerospace Times Optical-electronic Technology Co., Ltd., Beijing, China, 100040
国际会议
西安
英文
1342-1345
2010-08-16（万方平台首次上网日期，不代表论文的发表时间）