Fabrication of carbon nanotube thermal interface material on aluminium alloy substrates

摘要：

High quality vertically aligned carbon nanotube (VACNT) arrays have been synthesized on bulk Al alloy (Al6063) substrates with an Fe catalyst using low pressure chemical vapor deposition (LPCVD). The pretreatment process of the catalyst was shown to play a critical role, and it was studied comprehensively and optimized to grow high quality VACNT arrays within a wide range thicknesses of catalyst layer (2nm -11 nm) and acetylene (C2H2) flow rates (100sccm 300sccm). The thermal performance of the resulting VACNT arrays is evaluated. The minimum thermal interfacial resistance of the Al-CNT-Si interfaces achieved so far is only 4 mm2·K/W, and the average value is 14.6 mm2·K/W.

作者: Zhaoli Gao Kai Zhang M. M. F. Yuen

作者单位: Department of Mechanical Engineering, Hong Kong University of Science and Technology Clear Water Bay, Kowloon, Hong Kong SAR, China

会议类型: 国际会议

会议名称: 2010 11th International Conference on Electronic Packaging Technology & High Density Packaging(2010 电子封装技术与高密度封装国际会议)

会议地点: 西安

会议语种:英文

页码: 1401-1408

在线出版日期: 2010-08-16（万方平台首次上网日期，不代表论文的发表时间）