A Surface Micromachined Capacitive Pressure Sensor for Intraocular Pressure Measurement

摘要：

In glaucoma patients, intraocular pressure (IOP) is a parameter that plays significant role in disease diagnosis and treatment. Continuous IOP measurements could help capture fluctuations in IOP that are found to be relevant to disease progression. In this paper, an implantable surface micro-machined capacitive pressure sensor that can be used as a part of LC tank implant circuit is discussed. A three layer Polysilicon process was used for sensor fabrication. A preliminary study on sensor coil is also presented.

关键词： glaucoma intraocular pressure capacitive sensor wireless sensing.

作者: Kalyan C. Katuri Melur K. Ramasubramanian Sanjay Asrani

作者单位: Department of Mechanical and Aerospace Engineering, North Carolina State University,Raleigh, NC 2769 Department of Ophthalmology, Duke University MedicalCenter, Durham, NC 27710 USA

会议类型: 国际会议

会议名称: 2010 IEEE/ASME International Conference on Mechatronic and Embedded System and Applications(2010 IEEE 机电一体化和嵌入式系统与应用国际会议)

会议地点: 青岛

会议语种:英文

页码: 149-154

在线出版日期: 2010-07-15（万方平台首次上网日期，不代表论文的发表时间）